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Reactive Sputter Deposition [electronic resource] / edited by Diederik Depla, Stijn Mahieu.

By: Depla, Diederik.
Contributor(s): Mahieu, Stijn | SpringerLink (Online service).
Material type: materialTypeLabelBookSeries: Springer Series in Materials Science, 109.Publisher: Berlin, Heidelberg : Springer Berlin Heidelberg, 2008Description: digital.ISBN: 9783540766643.Subject(s): Chemistry | Chemistry, Physical organic | Chemical engineering | Surfaces (Physics) | Chemistry | Surfaces and Interfaces, Thin Films | Condensed Matter Physics | Physical Chemistry | Industrial Chemistry/Chemical EngineeringDDC classification: 620.44 Online resources: Click here to access online In: Springer eBooks
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