Depla, Diederik.
Reactive Sputter Deposition [electronic resource] / edited by Diederik Depla, Stijn Mahieu. - Berlin, Heidelberg : Springer Berlin Heidelberg, 2008. - digital. - Springer Series in Materials Science, 109 0933-033X ; . - Springer Series in Materials Science, 109 .
9783540766643
10.1007/978-3-540-76664-3 doi
Chemistry.
Chemistry, Physical organic.
Chemical engineering.
Surfaces (Physics).
Chemistry.
Surfaces and Interfaces, Thin Films.
Condensed Matter Physics.
Physical Chemistry.
Industrial Chemistry/Chemical Engineering.
TA418.7-418.76 TA418.9.T45
620.44
Reactive Sputter Deposition [electronic resource] / edited by Diederik Depla, Stijn Mahieu. - Berlin, Heidelberg : Springer Berlin Heidelberg, 2008. - digital. - Springer Series in Materials Science, 109 0933-033X ; . - Springer Series in Materials Science, 109 .
9783540766643
10.1007/978-3-540-76664-3 doi
Chemistry.
Chemistry, Physical organic.
Chemical engineering.
Surfaces (Physics).
Chemistry.
Surfaces and Interfaces, Thin Films.
Condensed Matter Physics.
Physical Chemistry.
Industrial Chemistry/Chemical Engineering.
TA418.7-418.76 TA418.9.T45
620.44