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MEMS: A Practical Guide to Design, Analysis, and Applications [electronic resource] / edited by Jan G. Korvink, Oliver Paul.

By: Korvink, Jan G.
Contributor(s): Paul, Oliver | SpringerLink (Online service).
Material type: materialTypeLabelBookPublisher: Berlin, Heidelberg : Springer Berlin Heidelberg, 2006Description: digital.ISBN: 9783540336556.Subject(s): Engineering | Microwaves | Electronics | Optical materials | Nanotechnology | Engineering | Electronics and Microelectronics, Instrumentation | Optical and Electronic Materials | Nanotechnology | Microwaves, RF and Optical EngineeringDDC classification: 621.381 Online resources: Click here to access online In: Springer eBooks
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