Korvink, Jan G.
MEMS: A Practical Guide to Design, Analysis, and Applications [electronic resource] / edited by Jan G. Korvink, Oliver Paul. - Berlin, Heidelberg : Springer Berlin Heidelberg, 2006. - digital.
9783540336556
10.1007/978-3-540-33655-6 doi
Engineering.
Microwaves.
Electronics.
Optical materials.
Nanotechnology.
Engineering.
Electronics and Microelectronics, Instrumentation.
Optical and Electronic Materials.
Nanotechnology.
Microwaves, RF and Optical Engineering.
TK7800-8360 TK7874-7874.9
621.381
MEMS: A Practical Guide to Design, Analysis, and Applications [electronic resource] / edited by Jan G. Korvink, Oliver Paul. - Berlin, Heidelberg : Springer Berlin Heidelberg, 2006. - digital.
9783540336556
10.1007/978-3-540-33655-6 doi
Engineering.
Microwaves.
Electronics.
Optical materials.
Nanotechnology.
Engineering.
Electronics and Microelectronics, Instrumentation.
Optical and Electronic Materials.
Nanotechnology.
Microwaves, RF and Optical Engineering.
TK7800-8360 TK7874-7874.9
621.381