Shape and Functional Elements of the Bulk Silicon Microtechnique [electronic resource] : A Manual of Wet-Etched Silicon Structures / by Joachim Frühauf.
By: Frühauf, Joachim.
Contributor(s): SpringerLink (Online service).
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BookPublisher: Berlin, Heidelberg : Springer Berlin Heidelberg, 2005Description: digital.ISBN: 9783540268765.Subject(s): Chemistry | Chemical engineering | Microwaves | Electronics | Optical materials | Chemistry | Optical and Electronic Materials | Electronics and Microelectronics, Instrumentation | Ceramics, Glass, Composites, Natural Methods | Microwaves, RF and Optical Engineering | Industrial Chemistry/Chemical EngineeringOnline resources: Click here to access online
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