Frühauf, Joachim.
Shape and Functional Elements of the Bulk Silicon Microtechnique A Manual of Wet-Etched Silicon Structures / [electronic resource] : by Joachim Frühauf. - Berlin, Heidelberg : Springer Berlin Heidelberg, 2005. - digital.
9783540268765
10.1007/b138230 doi
Chemistry.
Chemical engineering.
Microwaves.
Electronics.
Optical materials.
Chemistry.
Optical and Electronic Materials.
Electronics and Microelectronics, Instrumentation.
Ceramics, Glass, Composites, Natural Methods.
Microwaves, RF and Optical Engineering.
Industrial Chemistry/Chemical Engineering.
Shape and Functional Elements of the Bulk Silicon Microtechnique A Manual of Wet-Etched Silicon Structures / [electronic resource] : by Joachim Frühauf. - Berlin, Heidelberg : Springer Berlin Heidelberg, 2005. - digital.
9783540268765
10.1007/b138230 doi
Chemistry.
Chemical engineering.
Microwaves.
Electronics.
Optical materials.
Chemistry.
Optical and Electronic Materials.
Electronics and Microelectronics, Instrumentation.
Ceramics, Glass, Composites, Natural Methods.
Microwaves, RF and Optical Engineering.
Industrial Chemistry/Chemical Engineering.