Precision Nanometrology [electronic resource] : Sensors and Measuring Systems for Nanomanufacturing / by Wei Gao.
By: Gao, Wei.
Contributor(s): SpringerLink (Online service).
Material type:
BookSeries: Springer Series in Advanced Manufacturing, 0.Publisher: London : Springer London, 2010Description: digital.ISBN: 9781849962544.Subject(s): Engineering | Control engineering systems | Machinery | Nanotechnology | Engineering | Manufacturing, Machines, Tools | Measurement Science and Instrumentation | Nanotechnology | Control , Robotics, MechatronicsDDC classification: 670 Online resources: Click here to access online
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