Gao, Wei.
Precision Nanometrology Sensors and Measuring Systems for Nanomanufacturing / [electronic resource] : by Wei Gao. - London : Springer London, 2010. - digital. - Springer Series in Advanced Manufacturing, 0 1860-5168 ; . - Springer Series in Advanced Manufacturing, 0 .
9781849962544
10.1007/978-1-84996-254-4 doi
Engineering.
Control engineering systems.
Machinery.
Nanotechnology.
Engineering.
Manufacturing, Machines, Tools.
Measurement Science and Instrumentation.
Nanotechnology.
Control , Robotics, Mechatronics.
TJ241
670
Precision Nanometrology Sensors and Measuring Systems for Nanomanufacturing / [electronic resource] : by Wei Gao. - London : Springer London, 2010. - digital. - Springer Series in Advanced Manufacturing, 0 1860-5168 ; . - Springer Series in Advanced Manufacturing, 0 .
9781849962544
10.1007/978-1-84996-254-4 doi
Engineering.
Control engineering systems.
Machinery.
Nanotechnology.
Engineering.
Manufacturing, Machines, Tools.
Measurement Science and Instrumentation.
Nanotechnology.
Control , Robotics, Mechatronics.
TJ241
670