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Defects in High-k Gate Dielectric Stacks [electronic resource] : Nano-Electronic Semiconductor Devices / edited by Evgeni Gusev.

By: Gusev, Evgeni.
Contributor(s): SpringerLink (Online service).
Material type: materialTypeLabelBookSeries: NATO Science Series II: Mathematics, Physics and Chemistry, 220.Publisher: Dordrecht : Springer Netherlands, 2006Description: digital.ISBN: 9781402043673.Subject(s): Engineering | Condensed matter | Electronics | Engineering | Electronic and Computer Engineering | Condensed Matter | Physics and Applied Physics in Engineering | Electronics and Microelectronics, InstrumentationDDC classification: 621.3 Online resources: Click here to access online In: Springer eBooks
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