Gusev, Evgeni.

Defects in High-k Gate Dielectric Stacks Nano-Electronic Semiconductor Devices / [electronic resource] : edited by Evgeni Gusev. - Dordrecht : Springer Netherlands, 2006. - digital. - NATO Science Series II: Mathematics, Physics and Chemistry, 220 1568-2609 ; . - NATO Science Series II: Mathematics, Physics and Chemistry, 220 .

9781402043673

10.1007/1-4020-4367-8 doi


Engineering.
Condensed matter.
Electronics.
Engineering.
Electronic and Computer Engineering.
Condensed Matter.
Physics and Applied Physics in Engineering.
Electronics and Microelectronics, Instrumentation.

TK1-9971

621.3

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