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Multi-Wafer Rotating MEMS Machines [electronic resource] : Turbines, Generators, and Engines / edited by Jeffrey Lang.

By: Lang, Jeffrey.
Contributor(s): SpringerLink (Online service).
Material type: materialTypeLabelBookSeries: MEMS Reference Shelf.Publisher: Boston, MA : Springer US, 2010Description: digital.ISBN: 9780387777474.Subject(s): Engineering | Computer engineering | Electronics | Systems engineering | Electric engineering | Engineering | Electronics and Microelectronics, Instrumentation | Energy Technology | Circuits and Systems | Electrical Engineering | Energy, generalDDC classification: 621.381 Online resources: Click here to access online In: Springer eBooks
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