Lang, Jeffrey.
Multi-Wafer Rotating MEMS Machines Turbines, Generators, and Engines / [electronic resource] : edited by Jeffrey Lang. - Boston, MA : Springer US, 2010. - digital. - MEMS Reference Shelf, 1936-4407 . - MEMS Reference Shelf, .
9780387777474
10.1007/978-0-387-77747-4 doi
Engineering.
Computer engineering.
Electronics.
Systems engineering.
Electric engineering.
Engineering.
Electronics and Microelectronics, Instrumentation.
Energy Technology.
Circuits and Systems.
Electrical Engineering.
Energy, general.
TK7800-8360 TK7874-7874.9
621.381
Multi-Wafer Rotating MEMS Machines Turbines, Generators, and Engines / [electronic resource] : edited by Jeffrey Lang. - Boston, MA : Springer US, 2010. - digital. - MEMS Reference Shelf, 1936-4407 . - MEMS Reference Shelf, .
9780387777474
10.1007/978-0-387-77747-4 doi
Engineering.
Computer engineering.
Electronics.
Systems engineering.
Electric engineering.
Engineering.
Electronics and Microelectronics, Instrumentation.
Energy Technology.
Circuits and Systems.
Electrical Engineering.
Energy, general.
TK7800-8360 TK7874-7874.9
621.381