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Electroceramic-Based MEMS [electronic resource] : Fabrication-Technology and Applications / edited by Nava Setter.

By: Setter, Nava.
Contributor(s): SpringerLink (Online service).
Material type: materialTypeLabelBookSeries: Electronic Materials: Science and Technology, 9.Publisher: Boston, MA : Springer US, 2005Description: digital.ISBN: 9780387233192.Subject(s): Chemistry | Electronics | Optical materials | Nanotechnology | Surfaces (Physics) | Chemistry | Nanotechnology | Ceramics, Glass, Composites, Natural Methods | Optical and Electronic Materials | Electronics and Microelectronics, Instrumentation | Characterization and Evaluation of MaterialsOnline resources: Click here to access online In: Springer eBooks
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