Setter, Nava.
Electroceramic-Based MEMS Fabrication-Technology and Applications / [electronic resource] : edited by Nava Setter. - Boston, MA : Springer US, 2005. - digital. - Electronic Materials: Science and Technology, 9 1386-3290 ; . - Electronic Materials: Science and Technology, 9 .
9780387233192
10.1007/b101200 doi
Chemistry.
Electronics.
Optical materials.
Nanotechnology.
Surfaces (Physics).
Chemistry.
Nanotechnology.
Ceramics, Glass, Composites, Natural Methods.
Optical and Electronic Materials.
Electronics and Microelectronics, Instrumentation.
Characterization and Evaluation of Materials.
Electroceramic-Based MEMS Fabrication-Technology and Applications / [electronic resource] : edited by Nava Setter. - Boston, MA : Springer US, 2005. - digital. - Electronic Materials: Science and Technology, 9 1386-3290 ; . - Electronic Materials: Science and Technology, 9 .
9780387233192
10.1007/b101200 doi
Chemistry.
Electronics.
Optical materials.
Nanotechnology.
Surfaces (Physics).
Chemistry.
Nanotechnology.
Ceramics, Glass, Composites, Natural Methods.
Optical and Electronic Materials.
Electronics and Microelectronics, Instrumentation.
Characterization and Evaluation of Materials.