000 03548nam a22005535i 4500
001 978-3-642-40387-3
003 DE-He213
005 20140220082520.0
007 cr nn 008mamaa
008 131029s2014 gw | s |||| 0|eng d
020 _a9783642403873
_9978-3-642-40387-3
024 7 _a10.1007/978-3-642-40387-3
_2doi
050 4 _aT174.7
050 4 _aTA418.9.N35
072 7 _aTBN
_2bicssc
072 7 _aTEC027000
_2bisacsh
072 7 _aSCI050000
_2bisacsh
082 0 4 _a620.115
_223
100 1 _aLiu, Qian.
_eauthor.
245 1 0 _aNovel Optical Technologies for Nanofabrication
_h[electronic resource] /
_cby Qian Liu, Xuanming Duan, Changsi Peng.
264 1 _aBerlin, Heidelberg :
_bSpringer Berlin Heidelberg :
_bImprint: Springer,
_c2014.
300 _aIX, 267 p. 232 illus., 162 illus. in color.
_bonline resource.
336 _atext
_btxt
_2rdacontent
337 _acomputer
_bc
_2rdamedia
338 _aonline resource
_bcr
_2rdacarrier
347 _atext file
_bPDF
_2rda
490 1 _aNanostructure Science and Technology,
_x1571-5744
505 0 _aIntroduction -- Super-resolution Laser Direct Writing and Its Applications -- Laser path-guided wrinkle structures -- Laser Micro/Nanofabrication and Applications Based on Multiphoton Process -- Laser Interference Nano-Fabrication -- Super-Resolution Patterning and Photolithography Based on Surface Plasmon Polaritons -- Mass production of large-format micro/nano-structure based optical devices.
520 _aNovel Optical Technologies for Nanofabrication describes recent advances made in micro/nanofabrication with super-resolution laser technologies, which are based on the latest research findings in the authors’ groups. It focuses on new  techniques and methods as well as applications and development trends  in laser nanofabrication, including super-resolution laser direct writing,  surface structures composed of laser path-guided wrinkle, three-dimensional laser nanofabrication based on  two-photon absorption, and nanofabrication by laser interference and surface plasmon polaritons. This book serves as a reference for academic researchers, engineers, technical professionals and graduate students in the fields of micro/nanotechnology, thin film materials, super-resolution optics and laser techniques. Qian Liu is a Professor at Laboratory for Nanodevice, National Center for Nanoscience and Technology, China. Xuanming Duan is a Professor at the Key Laboratory of Functional Crystals and Laser Technology, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, China Changsi Peng is a Professor at the Institute of Information Optical Engineering, Soochow University, China.
650 0 _aEngineering.
650 0 _aOptical materials.
650 0 _aNanotechnology.
650 1 4 _aMaterials Science.
650 2 4 _aNanotechnology.
650 2 4 _aNanotechnology and Microengineering.
650 2 4 _aLaser Technology, Photonics.
650 2 4 _aOptical and Electronic Materials.
650 2 4 _aNanoscale Science and Technology.
650 2 4 _aOptics, Optoelectronics, Plasmonics and Optical Devices.
700 1 _aDuan, Xuanming.
_eauthor.
700 1 _aPeng, Changsi.
_eauthor.
710 2 _aSpringerLink (Online service)
773 0 _tSpringer eBooks
776 0 8 _iPrinted edition:
_z9783642403866
830 0 _aNanostructure Science and Technology,
_x1571-5744
856 4 0 _uhttp://dx.doi.org/10.1007/978-3-642-40387-3
912 _aZDB-2-CMS
999 _c93420
_d93420