000 02431nam a22004815i 4500
001 978-1-4614-8054-9
003 DE-He213
005 20140220082500.0
007 cr nn 008mamaa
008 131018s2014 xxu| s |||| 0|eng d
020 _a9781461480549
_9978-1-4614-8054-9
024 7 _a10.1007/978-1-4614-8054-9
_2doi
050 4 _aQD551-578
072 7 _aPNRH
_2bicssc
072 7 _aSCI013050
_2bisacsh
082 0 4 _a541.37
_223
100 1 _aHwang, Choel Seong.
_eeditor.
245 1 0 _aAtomic Layer Deposition for Semiconductors
_h[electronic resource] /
_cedited by Choel Seong Hwang.
264 1 _aBoston, MA :
_bSpringer US :
_bImprint: Springer,
_c2014.
300 _aX, 263 p. 170 illus., 81 illus. in color.
_bonline resource.
336 _atext
_btxt
_2rdacontent
337 _acomputer
_bc
_2rdamedia
338 _aonline resource
_bcr
_2rdacarrier
347 _atext file
_bPDF
_2rda
505 0 _aIntroduction -- Precursors and reaction mechanisms -- ALD simulations -- ALD for mass-production memories (DRAM and Flash) -- ALD for emerging memories -- PcRAM -- FeRAM -- Front end of the line process -- Back end of the line -- ALD machines.
520 _aAtomic Layer Deposition (ALD) was originally designed for depositing uniform passivation layers over a very large area  for display devices in the late 1970s. Only recently, in the 21st century, has the this technique become popular for high integrated semiconductor memory devices. This book discusses ALD for all modern semiconductor devices, the basic chemistry of ALD, and models of ALD processes. The book also details ALD for both mass produced memories and emerging memories. Each chapter of the book provides history, operating principles, and a full explanation of ALD processes for each device.
650 0 _aChemistry.
650 0 _aMemory management (Computer science).
650 0 _aElectronics.
650 0 _aElectric engineering.
650 1 4 _aChemistry.
650 2 4 _aElectrochemistry.
650 2 4 _aSemiconductors.
650 2 4 _aMemory Structures.
650 2 4 _aEnergy Technology.
650 2 4 _aElectronics and Microelectronics, Instrumentation.
710 2 _aSpringerLink (Online service)
773 0 _tSpringer eBooks
776 0 8 _iPrinted edition:
_z9781461480532
856 4 0 _uhttp://dx.doi.org/10.1007/978-1-4614-8054-9
912 _aZDB-2-CMS
999 _c92095
_d92095