000			01675nam a22004815i 4500
001			978-90-481-3807-4
003			DE-He213
005			20130515022443.0
007			cr nn 008mamaa
008			100316s2010 ne | s |||| 0|eng d
020			_a9789048138074 _9978-90-481-3807-4
024	7		_a10.1007/978-90-481-3807-4 _2doi
050		4	_aTP248.13-248.65
072		7	_aTDCB _2bicssc
072		7	_aSCI010000 _2bisacsh
082	0	4	_a660.6 _223
100	1		_aGusev, Evgeni.
245	1	0	_aAdvanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators _h[electronic resource] / _cedited by Evgeni Gusev, Eric Garfunkel, Arthur Dideikin.
260			_aDordrecht : _bSpringer Netherlands, _c2010.
300			_bdigital.
490	0		_aNATO Science for Peace and Security Series B: Physics and Biophysics, _x1874-6500
650		0	_aChemistry.
650		0	_aMicroreactors.
650		0	_aMechanics.
650		0	_aMechanical engineering.
650		0	_aEngineering.
650		0	_aMicrowaves.
650	1	4	_aChemistry.
650	2	4	_aMicroengineering.
650	2	4	_aNanotechnology and Microengineering.
650	2	4	_aMechanics.
650	2	4	_aMechanical Engineering.
650	2	4	_aMicrowaves, RF and Optical Engineering.
700	1		_aGarfunkel, Eric.
700	1		_aDideikin, Arthur.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
776	0	8	_iPrinted edition: _z9789048138050
830		0	_aNATO Science for Peace and Security Series B: Physics and Biophysics, _x1874-6500
856	4	0	_uhttp://dx.doi.org/10.1007/978-90-481-3807-4
912			_aZDB-2-PHA
999			_c87640 _d87640