000			01631nam a22004815i 4500
001			978-90-481-2520-3
003			DE-He213
005			20130515022420.0
007			cr nn 008mamaa
008			100301s2010 ne | s |||| 0|eng d
020			_a9789048125203 _9978-90-481-2520-3
024	7		_a10.1007/978-90-481-2520-3 _2doi
050		4	_aTA174
072		7	_aTBD _2bicssc
072		7	_aTEC016020 _2bisacsh
082	0	4	_a620.0042 _223
100	1		_aDeulin, E. A.
245	1	0	_aMechanics and Physics of Precise Vacuum Mechanisms _h[electronic resource] / _cby E. A. Deulin, V. P. Mikhailov, Yu V. Panfilov, R. A. Nevshupa.
260			_aDordrecht : _bSpringer Netherlands, _c2010.
300			_bdigital.
490	0		_aFluid Mechanics and Its Applications, _x0926-5112 ; _v91
650		0	_aEngineering.
650		0	_aVibration.
650		0	_aEngineering design.
650		0	_aChemistry, inorganic.
650		0	_aSurfaces (Physics).
650	1	4	_aEngineering.
650	2	4	_aEngineering Design.
650	2	4	_aEngineering, general.
650	2	4	_aTribology, Corrosion and Coatings.
650	2	4	_aSurfaces and Interfaces, Thin Films.
650	2	4	_aVibration, Dynamical Systems, Control.
700	1		_aMikhailov, V. P.
700	1		_aPanfilov, Yu V.
700	1		_aNevshupa, R. A.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
776	0	8	_iPrinted edition: _z9789048125197
830		0	_aFluid Mechanics and Its Applications, _x0926-5112 ; _v91
856	4	0	_uhttp://dx.doi.org/10.1007/978-90-481-2520-3
912			_aZDB-2-PHA
999			_c87274 _d87274