000			01626nam a22004695i 4500
001			978-3-642-15868-1
003			DE-He213
005			20130515022115.0
007			cr nn 008mamaa
008			110302s2011 gw | s |||| 0|eng d
020			_a9783642158681 _9978-3-642-15868-1
024	7		_a10.1007/978-3-642-15868-1 _2doi
050		4	_aT174.7
072		7	_aTDPB _2bicssc
072		7	_aTEC027000 _2bisacsh
082	0	4	_a620.5 _223
100	1		_aNazarov, Alexei.
245	1	0	_aSemiconductor-On-Insulator Materials for Nanoelectronics Applications _h[electronic resource] / _cedited by Alexei Nazarov, J.-P. Colinge, Francis Balestra, Jean-Pierre Raskin, Francisco Gamiz, V.S. Lysenko.
260			_aBerlin, Heidelberg : _bSpringer Berlin Heidelberg, _c2011.
300			_bdigital.
490	0		_aEngineering Materials, _x1612-1317
650		0	_aEngineering.
650		0	_aNanotechnology.
650		0	_aSurfaces (Physics).
650	1	4	_aEngineering.
650	2	4	_aNanotechnology and Microengineering.
650	2	4	_aNanotechnology.
650	2	4	_aSemiconductors.
650	2	4	_aCharacterization and Evaluation of Materials.
700	1		_aColinge, J.-P.
700	1		_aBalestra, Francis.
700	1		_aRaskin, Jean-Pierre.
700	1		_aGamiz, Francisco.
700	1		_aLysenko, V.S.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
776	0	8	_iPrinted edition: _z9783642158674
830		0	_aEngineering Materials, _x1612-1317
856	4	0	_uhttp://dx.doi.org/10.1007/978-3-642-15868-1
912			_aZDB-2-CMS
999			_c84115 _d84115