| 000 | 01486nam a22004335i 4500 | ||
|---|---|---|---|
| 001 | 978-3-642-12903-2 | ||
| 003 | DE-He213 | ||
| 005 | 20130515022032.0 | ||
| 007 | cr nn 008mamaa | ||
| 008 | 110304s2011 gw | s |||| 0|eng d | ||
| 020 |
_a9783642129032 _9978-3-642-12903-2 |
||
| 024 | 7 |
_a10.1007/978-3-642-12903-2 _2doi |
|
| 050 | 4 | _aT174.7 | |
| 072 | 7 |
_aTDPB _2bicssc |
|
| 072 | 7 |
_aTEC027000 _2bisacsh |
|
| 082 | 0 | 4 |
_a620.5 _223 |
| 100 | 1 | _aBüttgenbach, Stephanus. | |
| 245 | 1 | 0 |
_aDesign and Manufacturing of Active Microsystems _h[electronic resource] / _cedited by Stephanus Büttgenbach, Arne Burisch, Jürgen Hesselbach. |
| 260 |
_aBerlin, Heidelberg : _bSpringer Berlin Heidelberg, _c2011. |
||
| 300 | _bdigital. | ||
| 490 | 0 |
_aMicrotechnology and MEMS, _x1615-8326 |
|
| 650 | 0 | _aEngineering. | |
| 650 | 0 | _aStructural control (Engineering). | |
| 650 | 0 | _aNanotechnology. | |
| 650 | 1 | 4 | _aEngineering. |
| 650 | 2 | 4 | _aNanotechnology and Microengineering. |
| 650 | 2 | 4 | _aMechatronics. |
| 650 | 2 | 4 | _aOperating Procedures, Materials Treatment. |
| 650 | 2 | 4 | _aNanotechnology. |
| 700 | 1 | _aBurisch, Arne. | |
| 700 | 1 | _aHesselbach, Jürgen. | |
| 710 | 2 | _aSpringerLink (Online service) | |
| 773 | 0 | _tSpringer eBooks | |
| 776 | 0 | 8 |
_iPrinted edition: _z9783642129025 |
| 830 | 0 |
_aMicrotechnology and MEMS, _x1615-8326 |
|
| 856 | 4 | 0 | _uhttp://dx.doi.org/10.1007/978-3-642-12903-2 |
| 912 | _aZDB-2-CMS | ||
| 999 |
_c83352 _d83352 |
||