000 01582nam a22004575i 4500
001 978-3-642-03160-1
003 DE-He213
005 20130515021917.0
007 cr nn 008mamaa
008 100301s2010 gw | s |||| 0|eng d
020 _a9783642031601
_9978-3-642-03160-1
024 7 _a10.1007/978-3-642-03160-1
_2doi
050 4 _aTA418.7-418.76
050 4 _aTA418.9.T45
072 7 _aTGM
_2bicssc
072 7 _aTEC021000
_2bisacsh
082 0 4 _a620.44
_223
100 1 _aShimizu, Kenichi.
245 1 0 _aNew Horizons of Applied Scanning Electron Microscopy
_h[electronic resource] /
_cby Kenichi Shimizu, Tomoaki Mitani.
260 _aBerlin, Heidelberg :
_bSpringer Berlin Heidelberg,
_c2010.
300 _bdigital.
490 0 _aSpringer Series in Surface Sciences,
_x0931-5195 ;
_v45
650 0 _aEngineering.
650 0 _aNanotechnology.
650 0 _aSurfaces (Physics).
650 1 4 _aMaterials Science.
650 2 4 _aSurfaces and Interfaces, Thin Films.
650 2 4 _aMeasurement Science and Instrumentation.
650 2 4 _aSolid State Physics.
650 2 4 _aSpectroscopy and Microscopy.
650 2 4 _aNanotechnology.
650 2 4 _aNanotechnology and Microengineering.
700 1 _aMitani, Tomoaki.
710 2 _aSpringerLink (Online service)
773 0 _tSpringer eBooks
776 0 8 _iPrinted edition:
_z9783642031595
830 0 _aSpringer Series in Surface Sciences,
_x0931-5195 ;
_v45
856 4 0 _uhttp://dx.doi.org/10.1007/978-3-642-03160-1
912 _aZDB-2-CMS
999 _c82122
_d82122