000			01340nam a22003855i 4500
001			978-3-540-69562-2
003			DE-He213
005			20130515021558.0
007			cr nn 008mamaa
008			100301s2007 gw | s |||| 0|eng d
020			_a9783540695622 _9978-3-540-69562-2
024	7		_a10.1007/978-3-540-69562-2 _2doi
100	1		_aGraf, Markus.
245	1	0	_aCMOS Hotplate Chemical Microsensors _h[electronic resource] / _cby Markus Graf, Diego Barrettino, Henry P. Baltes, Andreas Hierlemann.
260			_aBerlin, Heidelberg : _bSpringer Berlin Heidelberg, _c2007.
300			_bdigital.
490	0		_aMicrotechnology and MEMS, _x1615-8326
650		0	_aEngineering.
650		0	_aChemistry, Physical organic.
650		0	_aOptical materials.
650	1	4	_aEngineering.
650	2	4	_aPhysics and Applied Physics in Engineering.
650	2	4	_aPhysical Chemistry.
650	2	4	_aOptical and Electronic Materials.
700	1		_aBarrettino, Diego.
700	1		_aBaltes, Henry P.
700	1		_aHierlemann, Andreas.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
776	0	8	_iPrinted edition: _z9783540695615
830		0	_aMicrotechnology and MEMS, _x1615-8326
856	4	0	_uhttp://dx.doi.org/10.1007/978-3-540-69562-2
912			_aZDB-2-ENG
999			_c78662 _d78662