000			01316nam a22003495i 4500
001			978-3-540-44502-9
003			DE-He213
005			20130515021510.0
007			cr nn 008mamaa
008			100301s2007 gw | s |||| 0|eng d
020			_a9783540445029 _9978-3-540-44502-9
024	7		_a10.1007/978-3-540-44502-9 _2doi
100	1		_aBehrisch, Rainer.
245	1	0	_aSputtering by Particle Bombardment _h[electronic resource] : _bExperiments and Computer Calculations from Threshold to MeV Energies / _cedited by Rainer Behrisch, Wolfgang Eckstein.
260			_aBerlin, Heidelberg : _bSpringer Berlin Heidelberg, _c2007.
300			_bdigital.
490	0		_aTopics in Applied Physics, _x0303-4216 ; _v110
650		0	_aChemistry.
650		0	_aPlasma (Ionized gases).
650		0	_aSurfaces (Physics).
650	1	4	_aChemistry.
650	2	4	_aSurfaces and Interfaces, Thin Films.
650	2	4	_aAtoms and Molecules in Strong Fields, Plasma Physics.
700	1		_aEckstein, Wolfgang.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
776	0	8	_iPrinted edition: _z9783540445005
830		0	_aTopics in Applied Physics, _x0303-4216 ; _v110
856	4	0	_uhttp://dx.doi.org/10.1007/978-3-540-44502-9
912			_aZDB-2-PHA
999			_c77919 _d77919