000			01401nam a22004215i 4500
001			978-3-540-34613-5
003			DE-He213
005			20130515021443.0
007			cr nn 008mamaa
008			100301s2007 gw | s |||| 0|eng d
020			_a9783540346135 _9978-3-540-34613-5
024	7		_a10.1007/978-3-540-34613-5 _2doi
050		4	_aTK7888.4
072		7	_aTJFC _2bicssc
072		7	_aTEC008010 _2bisacsh
082	0	4	_a621.3815 _223
100	1		_aBechtold, Tamara.
245	1	0	_aFast Simulation of Electro-Thermal MEMS _h[electronic resource] : _bEfficient Dynamic Compact Models / _cby Tamara Bechtold, Evgenii B. Rudnyi, Jan G. Korvink.
260			_aBerlin, Heidelberg : _bSpringer Berlin Heidelberg, _c2007.
300			_bdigital.
650		0	_aEngineering.
650		0	_aMechanics.
650		0	_aElectronics.
650		0	_aSystems engineering.
650	1	4	_aEngineering.
650	2	4	_aCircuits and Systems.
650	2	4	_aElectronics and Microelectronics, Instrumentation.
650	2	4	_aPhysics and Applied Physics in Engineering.
650	2	4	_aMechanics.
700	1		_aRudnyi, Evgenii B.
700	1		_aKorvink, Jan G.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
776	0	8	_iPrinted edition: _z9783540346128
856	4	0	_uhttp://dx.doi.org/10.1007/978-3-540-34613-5
912			_aZDB-2-ENG
999			_c77420 _d77420