000			01407nam a22004335i 4500
001			978-3-540-33655-6
003			DE-He213
005			20130515021434.0
007			cr nn 008mamaa
008			100528s2006 gw | s |||| 0|eng d
020			_a9783540336556 _9978-3-540-33655-6
024	7		_a10.1007/978-3-540-33655-6 _2doi
050		4	_aTK7800-8360
050		4	_aTK7874-7874.9
072		7	_aTJF _2bicssc
072		7	_aTEC008000 _2bisacsh
082	0	4	_a621.381 _223
100	1		_aKorvink, Jan G.
245	1	0	_aMEMS: A Practical Guide to Design, Analysis, and Applications _h[electronic resource] / _cedited by Jan G. Korvink, Oliver Paul.
260			_aBerlin, Heidelberg : _bSpringer Berlin Heidelberg, _c2006.
300			_bdigital.
650		0	_aEngineering.
650		0	_aMicrowaves.
650		0	_aElectronics.
650		0	_aOptical materials.
650		0	_aNanotechnology.
650	1	4	_aEngineering.
650	2	4	_aElectronics and Microelectronics, Instrumentation.
650	2	4	_aOptical and Electronic Materials.
650	2	4	_aNanotechnology.
650	2	4	_aMicrowaves, RF and Optical Engineering.
700	1		_aPaul, Oliver.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
776	0	8	_iPrinted edition: _z9783540211174
856	4	0	_uhttp://dx.doi.org/10.1007/978-3-540-33655-6
912			_aZDB-2-ENG
999			_c77224 _d77224