000			01551nam a22004575i 4500
001			978-3-540-32642-7
003			DE-He213
005			20130515021418.0
007			cr nn 008mamaa
008			100301s2007 gw | s |||| 0|eng d
020			_a9783540326427 _9978-3-540-32642-7
024	7		_a10.1007/978-3-540-32642-7 _2doi
050		4	_aTK7800-8360
050		4	_aTK7874-7874.9
072		7	_aTJF _2bicssc
072		7	_aTEC008000 _2bisacsh
082	0	4	_a621.381 _223
100	1		_aBallas, Rüdiger G.
245	1	0	_aPiezoelectric Multilayer Beam Bending Actuators _h[electronic resource] : _bStatic and Dynamic Behavior and Aspects of Sensor Integration / _cby Rüdiger G. Ballas.
260			_aBerlin, Heidelberg : _bSpringer Berlin Heidelberg, _c2007.
300			_bdigital.
490	0		_aMicrotechnology and Mems, _x1615-8326
650		0	_aEngineering.
650		0	_aPhysics.
650		0	_aMechanics, applied.
650		0	_aElectronics.
650		0	_aOptical materials.
650	1	4	_aEngineering.
650	2	4	_aElectronics and Microelectronics, Instrumentation.
650	2	4	_aComplexity.
650	2	4	_aControl Engineering.
650	2	4	_aTheoretical and Applied Mechanics.
650	2	4	_aOptical and Electronic Materials.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
776	0	8	_iPrinted edition: _z9783540326410
830		0	_aMicrotechnology and Mems, _x1615-8326
856	4	0	_uhttp://dx.doi.org/10.1007/978-3-540-32642-7
912			_aZDB-2-ENG
999			_c76987 _d76987