000			01243nam a22003735i 4500
001			978-3-540-31372-4
003			DE-He213
005			20130515021328.0
007			cr nn 008mamaa
008			100301s2006 gw | s |||| 0|eng d
020			_a9783540313724 _9978-3-540-31372-4
024	7		_a10.1007/978-3-540-31372-4 _2doi
100	1		_aUkita, Hiroo.
245	1	0	_aMicromechanical Photonics _h[electronic resource] / _cby Hiroo Ukita.
260			_aBerlin, Heidelberg : _bSpringer Berlin Heidelberg, _c2006.
300			_bdigital.
490	0		_aMicrotechnology and Mems, _x1615-8326
650		0	_aPhysics.
650		0	_aMechanics.
650		0	_aPhysical optics.
650		0	_aMicrowaves.
650	1	4	_aPhysics.
650	2	4	_aApplied Optics, Optoelectronics, Optical Devices.
650	2	4	_aMechanics.
650	2	4	_aPhysics and Applied Physics in Engineering.
650	2	4	_aMicrowaves, RF and Optical Engineering.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
776	0	8	_iPrinted edition: _z9783540313335
830		0	_aMicrotechnology and Mems, _x1615-8326
856	4	0	_uhttp://dx.doi.org/10.1007/978-3-540-31372-4
912			_aZDB-2-PHA
999			_c76194 _d76194