000			01643nam a22004695i 4500
001			978-3-540-27372-1
003			DE-He213
005			20130515021250.0
007			cr nn 008mamaa
008			100301s2005 gw | s |||| 0|eng d
020			_a9783540273721 _9978-3-540-27372-1
024	7		_a10.1007/b138987 _2doi
100	1		_aHierlemann, Andreas.
245	1	0	_aIntegrated Chemical Microsensor Systems in CMOS Technology _h[electronic resource] / _cby Andreas Hierlemann ; edited by H. Baltes, Hiroyuki Fujita, Dorian Liepmann.
260			_aBerlin, Heidelberg : _bSpringer Berlin Heidelberg, _c2005.
300			_bdigital.
490	0		_aMicrotechnology and MEMS, _x1615-8326
650		0	_aChemistry.
650		0	_aAnalytical biochemistry.
650		0	_aWeights and measures.
650		0	_aElectronics.
650		0	_aOptical materials.
650		0	_aNanotechnology.
650		0	_aSurfaces (Physics).
650	1	4	_aChemistry.
650	2	4	_aNanotechnology.
650	2	4	_aAnalytical Chemistry.
650	2	4	_aOptical and Electronic Materials.
650	2	4	_aSurfaces and Interfaces, Thin Films.
650	2	4	_aMeasurement Science, Instrumentation.
650	2	4	_aElectronics and Microelectronics, Instrumentation.
700	1		_aBaltes, H.
700	1		_aFujita, Hiroyuki.
700	1		_aLiepmann, Dorian.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
776	0	8	_iPrinted edition: _z9783540237822
830		0	_aMicrotechnology and MEMS, _x1615-8326
856	4	0	_uhttp://dx.doi.org/10.1007/b138987
912			_aZDB-2-CMS
999			_c75588 _d75588