000			01352nam a22003735i 4500
001			978-3-540-26876-5
003			DE-He213
005			20130515021239.0
007			cr nn 008mamaa
008			100301s2005 gw | s |||| 0|eng d
020			_a9783540268765 _9978-3-540-26876-5
024	7		_a10.1007/b138230 _2doi
100	1		_aFrühauf, Joachim.
245	1	0	_aShape and Functional Elements of the Bulk Silicon Microtechnique _h[electronic resource] : _bA Manual of Wet-Etched Silicon Structures / _cby Joachim Frühauf.
260			_aBerlin, Heidelberg : _bSpringer Berlin Heidelberg, _c2005.
300			_bdigital.
650		0	_aChemistry.
650		0	_aChemical engineering.
650		0	_aMicrowaves.
650		0	_aElectronics.
650		0	_aOptical materials.
650	1	4	_aChemistry.
650	2	4	_aOptical and Electronic Materials.
650	2	4	_aElectronics and Microelectronics, Instrumentation.
650	2	4	_aCeramics, Glass, Composites, Natural Methods.
650	2	4	_aMicrowaves, RF and Optical Engineering.
650	2	4	_aIndustrial Chemistry/Chemical Engineering.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
776	0	8	_iPrinted edition: _z9783540221098
856	4	0	_uhttp://dx.doi.org/10.1007/b138230
912			_aZDB-2-CMS
999			_c75426 _d75426