000			01375nam a22003855i 4500
001			978-3-540-26462-0
003			DE-He213
005			20130515021232.0
007			cr nn 008mamaa
008			100301s2005 gw | s |||| 0|eng d
020			_a9783540264620 _9978-3-540-26462-0
024	7		_a10.1007/b137574 _2doi
100	1		_aHuff, H.R.
245	1	0	_aHigh Dielectric Constant Materials _h[electronic resource] : _bVLSI MOSFET Applications / _cedited by H.R. Huff, D.C. Gilmer.
260			_aBerlin, Heidelberg : _bSpringer Berlin Heidelberg, _c2005.
300			_bdigital.
490	0		_aSpringer Series in Advanced Microelectronics, _x1437-0387 ; _v16
650		0	_aChemistry.
650		0	_aCondensed matter.
650		0	_aOptical materials.
650		0	_aSurfaces (Physics).
650	1	4	_aChemistry.
650	2	4	_aOptical and Electronic Materials.
650	2	4	_aCondensed Matter.
650	2	4	_aSurfaces and Interfaces, Thin Films.
650	2	4	_aPhysics and Applied Physics in Engineering.
700	1		_aGilmer, D.C.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
776	0	8	_iPrinted edition: _z9783540210818
830		0	_aSpringer Series in Advanced Microelectronics, _x1437-0387 ; _v16
856	4	0	_uhttp://dx.doi.org/10.1007/b137574
912			_aZDB-2-CMS
999			_c75309 _d75309