000			01471nam a22004455i 4500
001			978-3-211-72861-1
003			DE-He213
005			20130515021220.0
007			cr nn 008mamaa
008			100301s2007 au | s |||| 0|eng d
020			_a9783211728611 _9978-3-211-72861-1
024	7		_a10.1007/978-3-211-72861-1 _2doi
050		4	_aTK7800-8360
050		4	_aTK7874-7874.9
072		7	_aTJF _2bicssc
072		7	_aTEC008000 _2bisacsh
082	0	4	_a621.381 _223
100	1		_aGrasser, Tibor.
245	1	0	_aSimulation of Semiconductor Processes and Devices 2007 _h[electronic resource] : _bSISPAD 2007 / _cedited by Tibor Grasser, Siegfried Selberherr.
260			_aVienna : _bSpringer Vienna, _c2007.
300			_bdigital.
650		0	_aEngineering.
650		0	_aComputer simulation.
650		0	_aElectronics.
650		0	_aOptical materials.
650		0	_aNanotechnology.
650	1	4	_aEngineering.
650	2	4	_aElectronics and Microelectronics, Instrumentation.
650	2	4	_aOptical and Electronic Materials.
650	2	4	_aNanotechnology.
650	2	4	_aNumerical and Computational Methods in Engineering.
650	2	4	_aSimulation and Modeling.
700	1		_aSelberherr, Siegfried.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
776	0	8	_iPrinted edition: _z9783211728604
856	4	0	_uhttp://dx.doi.org/10.1007/978-3-211-72861-1
912			_aZDB-2-ENG
999			_c75117 _d75117