000 01411nam a22004215i 4500
001 978-1-84996-254-4
003 DE-He213
005 20130515021204.0
007 cr nn 008mamaa
008 100611s2010 xxk| s |||| 0|eng d
020 _a9781849962544
_9978-1-84996-254-4
024 7 _a10.1007/978-1-84996-254-4
_2doi
050 4 _aTJ241
072 7 _aTGXT
_2bicssc
072 7 _aTEC020000
_2bisacsh
082 0 4 _a670
_223
100 1 _aGao, Wei.
245 1 0 _aPrecision Nanometrology
_h[electronic resource] :
_bSensors and Measuring Systems for Nanomanufacturing /
_cby Wei Gao.
260 _aLondon :
_bSpringer London,
_c2010.
300 _bdigital.
490 0 _aSpringer Series in Advanced Manufacturing,
_x1860-5168 ;
_v0
650 0 _aEngineering.
650 0 _aControl engineering systems.
650 0 _aMachinery.
650 0 _aNanotechnology.
650 1 4 _aEngineering.
650 2 4 _aManufacturing, Machines, Tools.
650 2 4 _aMeasurement Science and Instrumentation.
650 2 4 _aNanotechnology.
650 2 4 _aControl , Robotics, Mechatronics.
710 2 _aSpringerLink (Online service)
773 0 _tSpringer eBooks
776 0 8 _iPrinted edition:
_z9781849962537
830 0 _aSpringer Series in Advanced Manufacturing,
_x1860-5168 ;
_v0
856 4 0 _uhttp://dx.doi.org/10.1007/978-1-84996-254-4
912 _aZDB-2-ENG
999 _c74826
_d74826