000 01459nam a22004095i 4500
001 978-1-4020-4367-3
003 DE-He213
005 20130515020745.0
007 cr nn 008mamaa
008 100301s2006 ne | s |||| 0|eng d
020 _a9781402043673
_9978-1-4020-4367-3
024 7 _a10.1007/1-4020-4367-8
_2doi
050 4 _aTK1-9971
072 7 _aTHR
_2bicssc
072 7 _aTEC007000
_2bisacsh
082 0 4 _a621.3
_223
100 1 _aGusev, Evgeni.
245 1 0 _aDefects in High-k Gate Dielectric Stacks
_h[electronic resource] :
_bNano-Electronic Semiconductor Devices /
_cedited by Evgeni Gusev.
260 _aDordrecht :
_bSpringer Netherlands,
_c2006.
300 _bdigital.
490 0 _aNATO Science Series II: Mathematics, Physics and Chemistry,
_x1568-2609 ;
_v220
650 0 _aEngineering.
650 0 _aCondensed matter.
650 0 _aElectronics.
650 1 4 _aEngineering.
650 2 4 _aElectronic and Computer Engineering.
650 2 4 _aCondensed Matter.
650 2 4 _aPhysics and Applied Physics in Engineering.
650 2 4 _aElectronics and Microelectronics, Instrumentation.
710 2 _aSpringerLink (Online service)
773 0 _tSpringer eBooks
776 0 8 _iPrinted edition:
_z9781402043659
830 0 _aNATO Science Series II: Mathematics, Physics and Chemistry,
_x1568-2609 ;
_v220
856 4 0 _uhttp://dx.doi.org/10.1007/1-4020-4367-8
912 _aZDB-2-ENG
999 _c69815
_d69815