000			01472nam a22004575i 4500
001			978-0-387-77747-4
003			DE-He213
005			20130515020609.0
007			cr nn 008mamaa
008			100301s2010 xxu| s |||| 0|eng d
020			_a9780387777474 _9978-0-387-77747-4
024	7		_a10.1007/978-0-387-77747-4 _2doi
050		4	_aTK7800-8360
050		4	_aTK7874-7874.9
072		7	_aTJF _2bicssc
072		7	_aTEC008000 _2bisacsh
082	0	4	_a621.381 _223
100	1		_aLang, Jeffrey.
245	1	0	_aMulti-Wafer Rotating MEMS Machines _h[electronic resource] : _bTurbines, Generators, and Engines / _cedited by Jeffrey Lang.
260			_aBoston, MA : _bSpringer US, _c2010.
300			_bdigital.
490	0		_aMEMS Reference Shelf, _x1936-4407
650		0	_aEngineering.
650		0	_aComputer engineering.
650		0	_aElectronics.
650		0	_aSystems engineering.
650		0	_aElectric engineering.
650	1	4	_aEngineering.
650	2	4	_aElectronics and Microelectronics, Instrumentation.
650	2	4	_aEnergy Technology.
650	2	4	_aCircuits and Systems.
650	2	4	_aElectrical Engineering.
650	2	4	_aEnergy, general.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
776	0	8	_iPrinted edition: _z9780387777467
830		0	_aMEMS Reference Shelf, _x1936-4407
856	4	0	_uhttp://dx.doi.org/10.1007/978-0-387-77747-4
912			_aZDB-2-ENG
999			_c68206 _d68206