| 000 | 01207nam a22003495i 4500 | ||
|---|---|---|---|
| 001 | 978-0-387-68351-5 | ||
| 003 | DE-He213 | ||
| 005 | 20130515020520.0 | ||
| 007 | cr nn 008mamaa | ||
| 008 | 100301s2009 xxu| s |||| 0|eng d | ||
| 020 |
_a9780387683515 _9978-0-387-68351-5 |
||
| 024 | 7 |
_a10.1007/978-0-387-68351-5 _2doi |
|
| 100 | 1 | _aSolgaard, Olav. | |
| 245 | 1 | 0 |
_aPhotonic Microsystems _h[electronic resource] : _bMicro and Nanotechnology Applied to Optical Devices and Systems / _cby Olav Solgaard. |
| 260 |
_aBoston, MA : _bSpringer US, _c2009. |
||
| 300 | _bdigital. | ||
| 490 | 0 |
_aMEMS Reference Shelf, _x1936-4407 |
|
| 650 | 0 | _aEngineering. | |
| 650 | 0 | _aPhysical optics. | |
| 650 | 0 | _aSystems engineering. | |
| 650 | 1 | 4 | _aEngineering. |
| 650 | 2 | 4 | _aNanotechnology and Microengineering. |
| 650 | 2 | 4 | _aApplied Optics, Optoelectronics, Optical Devices. |
| 650 | 2 | 4 | _aCircuits and Systems. |
| 710 | 2 | _aSpringerLink (Online service) | |
| 773 | 0 | _tSpringer eBooks | |
| 776 | 0 | 8 |
_iPrinted edition: _z9780387290225 |
| 830 | 0 |
_aMEMS Reference Shelf, _x1936-4407 |
|
| 856 | 4 | 0 | _uhttp://dx.doi.org/10.1007/978-0-387-68351-5 |
| 912 | _aZDB-2-ENG | ||
| 999 |
_c67335 _d67335 |
||