000			01434nam a22004215i 4500
001			978-0-387-29261-8
003			DE-He213
005			20130515020434.0
007			cr nn 008mamaa
008			100301s2007 xxu| s |||| 0|eng d
020			_a9780387292618 _9978-0-387-29261-8
024	7		_a10.1007/978-0-387-29261-8 _2doi
100	1		_aAlford, Terry L.
245	1	0	_aFundamentals of Nanoscale Film Analysis _h[electronic resource] / _cby Terry L. Alford, Leonard C. Feldman, James W. Mayer.
260			_aBoston, MA : _bSpringer US, _c2007.
300			_bdigital.
650		0	_aChemistry.
650		0	_aCondensed matter.
650		0	_aParticles (Nuclear physics).
650		0	_aElectronics.
650		0	_aNanotechnology.
650		0	_aSurfaces (Physics).
650	1	4	_aChemistry.
650	2	4	_aCharacterization and Evaluation of Materials.
650	2	4	_aSurfaces and Interfaces, Thin Films.
650	2	4	_aNanotechnology.
650	2	4	_aSolid State Physics and Spectroscopy.
650	2	4	_aCondensed Matter.
650	2	4	_aElectronics and Microelectronics, Instrumentation.
700	1		_aFeldman, Leonard C.
700	1		_aMayer, James W.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
776	0	8	_iPrinted edition: _z9780387292601
856	4	0	_uhttp://dx.doi.org/10.1007/978-0-387-29261-8
912			_aZDB-2-CMS
999			_c66421 _d66421