000			01442nam a22004215i 4500
001			978-0-387-28843-7
003			DE-He213
005			20130515020430.0
007			cr nn 008mamaa
008			100301s2006 xxu| s |||| 0|eng d
020			_a9780387288437 _9978-0-387-28843-7
024	7		_a10.1007/0-387-28843-0 _2doi
100	1		_aLaconte, J.
245	1	0	_aMicromachined Thin-Film Sensors for SOI-CMOS Co-Integration _h[electronic resource] / _cby J. Laconte, D. Flandre, J. -P. Raskin.
260			_aBoston, MA : _bSpringer US, _c2006.
300			_bdigital.
650		0	_aEngineering.
650		0	_aParticles (Nuclear physics).
650		0	_aPhysical optics.
650		0	_aElectronics.
650		0	_aSystems engineering.
650		0	_aSurfaces (Physics).
650	1	4	_aEngineering.
650	2	4	_aPhysics and Applied Physics in Engineering.
650	2	4	_aElectronics and Microelectronics, Instrumentation.
650	2	4	_aCircuits and Systems.
650	2	4	_aSolid State Physics and Spectroscopy.
650	2	4	_aApplied Optics, Optoelectronics, Optical Devices.
650	2	4	_aSurfaces and Interfaces, Thin Films.
700	1		_aFlandre, D.
700	1		_aRaskin, J. -P.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
776	0	8	_iPrinted edition: _z9780387288420
856	4	0	_uhttp://dx.doi.org/10.1007/0-387-28843-0
912			_aZDB-2-ENG
999			_c66370 _d66370