000 01167nam a22003855i 4500
001 978-0-387-26132-4
003 DE-He213
005 20130515020412.0
007 cr nn 008mamaa
008 100301s2007 xxu| s |||| 0|eng d
020 _a9780387261324
_9978-0-387-26132-4
024 7 _a10.1007/b136902
_2doi
050 4 _aTJ1-1570
072 7 _aTGB
_2bicssc
072 7 _aTEC009070
_2bisacsh
082 0 4 _a621
_223
100 1 _aJackson, Mark J.
245 1 0 _aMicro and Nanomanufacturing
_h[electronic resource] /
_cby Mark J. Jackson.
260 _aBoston, MA :
_bSpringer US,
_c2007.
300 _bdigital.
650 0 _aEngineering.
650 0 _aMechanical engineering.
650 0 _aMachinery.
650 0 _aElectronics.
650 1 4 _aEngineering.
650 2 4 _aMechanical Engineering.
650 2 4 _aElectronics and Microelectronics, Instrumentation.
650 2 4 _aManufacturing, Machines, Tools.
710 2 _aSpringerLink (Online service)
773 0 _tSpringer eBooks
776 0 8 _iPrinted edition:
_z9780387258744
856 4 0 _uhttp://dx.doi.org/10.1007/b136902
912 _aZDB-2-ENG
999 _c66065
_d66065