| 000 | 01331nam a22003975i 4500 | ||
|---|---|---|---|
| 001 | 978-0-387-25834-8 | ||
| 003 | DE-He213 | ||
| 005 | 20130515020410.0 | ||
| 007 | cr nn 008mamaa | ||
| 008 | 100301s2005 xxu| s |||| 0|eng d | ||
| 020 |
_a9780387258348 _9978-0-387-25834-8 |
||
| 024 | 7 |
_a10.1007/b136228 _2doi |
|
| 100 | 1 | _aSantos, Héctor J. | |
| 245 | 1 | 0 |
_aPrinciples and Applications of NanoMEMS Physics _h[electronic resource] / _cby Héctor J. Santos. |
| 260 |
_aBoston, MA : _bSpringer US, _c2005. |
||
| 300 | _bdigital. | ||
| 490 | 0 |
_aMicrosystems, _x1389-2134 ; _v15 |
|
| 650 | 0 | _aChemistry. | |
| 650 | 0 | _aLaser physics. | |
| 650 | 0 | _aQuantum optics. | |
| 650 | 0 | _aOptical materials. | |
| 650 | 0 | _aNanotechnology. | |
| 650 | 1 | 4 | _aChemistry. |
| 650 | 2 | 4 | _aNanotechnology. |
| 650 | 2 | 4 | _aOptical and Electronic Materials. |
| 650 | 2 | 4 | _aElectronic and Computer Engineering. |
| 650 | 2 | 4 | _aLaser Technology and Physics, Photonics. |
| 650 | 2 | 4 | _aQuantum Optics, Quantum Electronics, Nonlinear Optics. |
| 710 | 2 | _aSpringerLink (Online service) | |
| 773 | 0 | _tSpringer eBooks | |
| 776 | 0 | 8 |
_iPrinted edition: _z9781402032387 |
| 830 | 0 |
_aMicrosystems, _x1389-2134 ; _v15 |
|
| 856 | 4 | 0 | _uhttp://dx.doi.org/10.1007/b136228 |
| 912 | _aZDB-2-CMS | ||
| 999 |
_c66020 _d66020 |
||