000 01256nam a22003855i 4500
001 978-0-387-25786-0
003 DE-He213
005 20130515020410.0
007 cr nn 008mamaa
008 100301s2006 xxu| s |||| 0|eng d
020 _a9780387257860
_9978-0-387-25786-0
024 7 _a10.1007/b136111
_2doi
100 1 _aLeondes, Cornelius T.
245 1 0 _aMEMS/NEMS
_h[electronic resource] :
_bHandbook Techniques and Applications /
_cedited by Cornelius T. Leondes.
260 _aBoston, MA :
_bSpringer US,
_c2006.
300 _bdigital.
650 0 _aChemistry.
650 0 _aMechanical engineering.
650 0 _aEngineering design.
650 0 _aElectronics.
650 0 _aOptical materials.
650 0 _aNanotechnology.
650 1 4 _aChemistry.
650 2 4 _aNanotechnology.
650 2 4 _aElectronics and Microelectronics, Instrumentation.
650 2 4 _aMechanical Engineering.
650 2 4 _aEngineering Design.
650 2 4 _aOptical and Electronic Materials.
710 2 _aSpringerLink (Online service)
773 0 _tSpringer eBooks
776 0 8 _iPrinted edition:
_z9780387245201
856 4 0 _uhttp://dx.doi.org/10.1007/b136111
912 _aZDB-2-CMS
999 _c66015
_d66015