| 000 | 01473nam a22004695i 4500 | ||
|---|---|---|---|
| 001 | 978-0-387-09511-0 | ||
| 003 | DE-He213 | ||
| 005 | 20130515020346.0 | ||
| 007 | cr nn 008mamaa | ||
| 008 | 100301s2010 xxu| s |||| 0|eng d | ||
| 020 |
_a9780387095110 _9978-0-387-09511-0 |
||
| 024 | 7 |
_a10.1007/978-0-387-09511-0 _2doi |
|
| 050 | 4 | _aTK7800-8360 | |
| 050 | 4 | _aTK7874-7874.9 | |
| 072 | 7 |
_aTJF _2bicssc |
|
| 072 | 7 |
_aTEC008000 _2bisacsh |
|
| 082 | 0 | 4 |
_a621.381 _223 |
| 100 | 1 | _aAdams, Thomas M. | |
| 245 | 1 | 0 |
_aIntroductory MEMS _h[electronic resource] : _bFabrication and Applications / _cby Thomas M. Adams, Richard A. Layton. |
| 250 | _a1. | ||
| 260 |
_aBoston, MA : _bSpringer US, _c2010. |
||
| 300 | _bdigital. | ||
| 650 | 0 | _aEngineering. | |
| 650 | 0 | _aMechanics. | |
| 650 | 0 | _aMaterials. | |
| 650 | 0 | _aElectronics. | |
| 650 | 0 | _aSystems engineering. | |
| 650 | 0 | _aSurfaces (Physics). | |
| 650 | 1 | 4 | _aEngineering. |
| 650 | 2 | 4 | _aElectronics and Microelectronics, Instrumentation. |
| 650 | 2 | 4 | _aCircuits and Systems. |
| 650 | 2 | 4 | _aMechanics. |
| 650 | 2 | 4 | _aSurfaces and Interfaces, Thin Films. |
| 650 | 2 | 4 | _aContinuum Mechanics and Mechanics of Materials. |
| 700 | 1 | _aLayton, Richard A. | |
| 710 | 2 | _aSpringerLink (Online service) | |
| 773 | 0 | _tSpringer eBooks | |
| 776 | 0 | 8 |
_iPrinted edition: _z9780387095103 |
| 856 | 4 | 0 | _uhttp://dx.doi.org/10.1007/978-0-387-09511-0 |
| 912 | _aZDB-2-ENG | ||
| 999 |
_c65525 _d65525 |
||