000			01394cam a2200265 a 4500
001			4362707
005			20130724090437.0
008			900620m19909999ne a b 101 0 eng
010			_a 90042223
020			_a0444884297(v. 1)
040			_aDLC _cDLC _dDLC
050	0	0	_aQC611.6 _b.D4 1989
082	0	0	_220
111	2		_aInternational Conference on the Science and Technology of Defect Control in Semiconductors _d(1989 : _cYokohama-shi, Japan) _919203
245	1	0	_aDefect control in semiconductors : _bproceedings of the International Conference on the Science and Technology of Defect Control in Semiconductors, the Yokohama 21st century forum, Yokohama, Japan, September 17-22 1989 / _cedited by K. Sumino.
260			_aAmsterdam ; _aNew York : _bNorth-Holland ; _aNew York, N.Y., U.S.A. : _bDistributors for the U.S. and Canada, Elsevier Science Pub. Co., _c1990.
300			_a2 v. : _bill. ; _c27 cm.
504			_aIncludes bibliographical references and indexes.
650		0	_aSemiconductors _xDefects _xCongresses. _919204
650		0	_aMaterials _xDefects _xCongresses. _919205
700	1		_aSumino, K. _q(Kojī), _d1931- _919206
906			_a7 _bcbc _corignew _d1 _eocip _f19 _gy-gencatlg
942			_2lcc _cBK _hQC611.6.D4 1989
999			_c28991 _d28991