| 000 | 01417cam a2200325 a 4500 | ||
|---|---|---|---|
| 001 | 1651244 | ||
| 005 | 20130515014559.0 | ||
| 008 | 970128s1997 nyua b 001 0 eng | ||
| 010 | _a 97001734 | ||
| 020 | _a0471127922 (cloth : acidfree paper) | ||
| 040 |
_aDLC _cDLC _dkepu |
||
| 050 | 0 | 0 |
_aTK7871.85 _b.S4453 1997 |
| 082 | 0 | 0 | _221 |
| 245 | 0 | 0 |
_aSemiconductor technology : _bprocessing and novel fabrication techniques / _cedited by Mikhail Levinshtein, Michael S. Shur. |
| 260 |
_aNew York : _bWiley, _cc1997. |
||
| 300 |
_axviii, 240 p. : _bill. ; _c24 cm. |
||
| 500 | _a"A Wiley-Interscience publication." | ||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aSemiconductors. _91588 |
|
| 650 | 0 |
_aSemiconductor doping. _910854 |
|
| 650 | 0 |
_aSemiconductors _xDefects. _910859 |
|
| 700 | 1 |
_aLevinshteĭn, M. E. _q(Mikhail Efimovich) _910860 |
|
| 700 | 1 |
_aShur, Michael. _910857 |
|
| 856 | 4 | 2 |
_3Contributor biographical information _uhttp://www.loc.gov/catdir/bios/wiley041/97001734.html |
| 856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/description/wiley032/97001734.html |
| 856 | 4 | 1 |
_3Table of contents _uhttp://www.loc.gov/catdir/toc/wiley022/97001734.html |
| 906 |
_a7 _bcbc _corignew _d1 _eocip _f19 _gy-gencatlg |
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| 942 |
_2lcc _cBK |
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| 999 |
_c22747 _d22747 |
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