000			02289nam a22004695i 4500
001			978-3-642-22173-6
003			DE-He213
005			20140220083807.0
007			cr nn 008mamaa
008			110721s2011 gw | s |||| 0|eng d
020			_a9783642221736 _9978-3-642-22173-6
024	7		_a10.1007/978-3-642-22173-6 _2doi
050		4	_aTJ212-225
072		7	_aTJFM _2bicssc
072		7	_aTEC004000 _2bisacsh
082	0	4	_a629.8 _223
100	1		_aEleftheriou, Evangelos. _eeditor.
245	1	0	_aControl Technologies for Emerging Micro and Nanoscale Systems _h[electronic resource] / _cedited by Evangelos Eleftheriou, S. O. Reza Moheimani.
264		1	_aBerlin, Heidelberg : _bSpringer Berlin Heidelberg, _c2011.
300			_aXVI, 292 p. _bonline resource.
336			_atext _btxt _2rdacontent
337			_acomputer _bc _2rdamedia
338			_aonline resource _bcr _2rdacarrier
347			_atext file _bPDF _2rda
490	1		_aLecture Notes in Control and Information Sciences, _x0170-8643 ; _v413
505	0		_aFrom the content: Techniques Developed for High-Speed AFM -- High-Accuracy Atomic Force Microscope -- High-Speed, Ultra-High-Precision Nano - A Signal Transformation Approach -- 2DOF Control Design for Nanopositioning.
520			_aThis book comprises a selection of the presentations made at the “Workshop on Dynamics and Control of Micro and Nanoscale Systems” held at IBM Research – Zurich, Switzerland, on the 10th and 11th of December 2009. The aim of the workshop was to bring together some of the leading researchers in the field of dynamics and control of micro- and nanoscale systems. It proved an excellent forum for discussing new ideas and approaches.
650		0	_aEngineering.
650		0	_aSystems theory.
650	1	4	_aEngineering.
650	2	4	_aControl.
650	2	4	_aNanotechnology and Microengineering.
650	2	4	_aSystems Theory, Control.
700	1		_aMoheimani, S. O. Reza. _eeditor.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
776	0	8	_iPrinted edition: _z9783642221729
830		0	_aLecture Notes in Control and Information Sciences, _x0170-8643 ; _v413
856	4	0	_uhttp://dx.doi.org/10.1007/978-3-642-22173-6
912			_aZDB-2-ENG
999			_c108139 _d108139