000 02459nam a22004815i 4500
001 978-3-642-19489-4
003 DE-He213
005 20140220083756.0
007 cr nn 008mamaa
008 110530s2011 gw | s |||| 0|eng d
020 _a9783642194894
_9978-3-642-19489-4
024 7 _a10.1007/978-3-642-19489-4
_2doi
050 4 _aT174.7
072 7 _aTDPB
_2bicssc
072 7 _aTEC027000
_2bisacsh
082 0 4 _a620.5
_223
100 1 _aSchomburg, Werner Karl.
_eauthor.
245 1 0 _aIntroduction to Microsystem Design
_h[electronic resource] /
_cby Werner Karl Schomburg.
264 1 _aBerlin, Heidelberg :
_bSpringer Berlin Heidelberg,
_c2011.
300 _aXXII, 322 p.
_bonline resource.
336 _atext
_btxt
_2rdacontent
337 _acomputer
_bc
_2rdamedia
338 _aonline resource
_bcr
_2rdacarrier
347 _atext file
_bPDF
_2rda
490 1 _aRWTHedition,
_x1865-0899 ;
_v1
505 0 _aPreface -- Notations and symbols -- Introduction -- Scaling Laws -- Elastic deformations -- Thin Films -- Conductor Paths -- Membranes -- Strain gauges on membranes -- Beams -- Vibrations -- Capillaries -- Capacitive forces -- Piezoelectric effect -- Thermal actuators -- Micro optics -- Diffusion -- Micro valves -- Micro pumps -- Micro dosing -- Analogies between physical domains -- Mechanical devices for electronics -- Pressure sensors -- Flow sensors -- Inertial sensors.
520 _aThe book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important in micro systems. For quick reference equations are presented in tables which are found in an index at the end of this book.
650 0 _aEngineering.
650 0 _aSystems engineering.
650 0 _aOptical materials.
650 1 4 _aEngineering.
650 2 4 _aNanotechnology and Microengineering.
650 2 4 _aOptical and Electronic Materials.
650 2 4 _aApplied and Technical Physics.
650 2 4 _aCircuits and Systems.
710 2 _aSpringerLink (Online service)
773 0 _tSpringer eBooks
776 0 8 _iPrinted edition:
_z9783642194887
830 0 _aRWTHedition,
_x1865-0899 ;
_v1
856 4 0 _uhttp://dx.doi.org/10.1007/978-3-642-19489-4
912 _aZDB-2-ENG
999 _c107563
_d107563