000			02930nam a22005415i 4500
001			978-3-642-15868-1
003			DE-He213
005			20140220083748.0
007			cr nn 008mamaa
008			110302s2011 gw | s |||| 0|eng d
020			_a9783642158681 _9978-3-642-15868-1
024	7		_a10.1007/978-3-642-15868-1 _2doi
050		4	_aT174.7
072		7	_aTDPB _2bicssc
072		7	_aTEC027000 _2bisacsh
082	0	4	_a620.5 _223
100	1		_aNazarov, Alexei. _eeditor.
245	1	0	_aSemiconductor-On-Insulator Materials for Nanoelectronics Applications _h[electronic resource] / _cedited by Alexei Nazarov, J.-P. Colinge, Francis Balestra, Jean-Pierre Raskin, Francisco Gamiz, V.S. Lysenko.
264		1	_aBerlin, Heidelberg : _bSpringer Berlin Heidelberg, _c2011.
300			_aIX, 400p. 118 illus., 18 illus. in color. _bonline resource.
336			_atext _btxt _2rdacontent
337			_acomputer _bc _2rdamedia
338			_aonline resource _bcr _2rdacarrier
347			_atext file _bPDF _2rda
490	1		_aEngineering Materials, _x1612-1317
505	0		_aNew semiconductor-on-insulator materials -- Physics of modern SemOI devices -- Diagnostics of the SOI devices -- Sensors and MEMS on SOI.
520			_a"Semiconductor-On-Insulator Materials for NanoElectonics Applications” is devoted to the fast evolving field of modern nanoelectronics, and more particularly to the physics and technology of nanoelectronic devices built on semiconductor-on-insulator (SemOI) systems. The book contains the achievements in this field from leading companies and universities in Europe, USA, Brazil and Russia. It is articulated around four main topics: 1. New semiconductor-on-insulator materials; 2. Physics of modern SemOI devices; 3. Advanced characterization of SemOI devices; 4. Sensors and MEMS on SOI. "Semiconductor-On-Insulator Materials for NanoElectonics Applications” is useful not only to specialists in nano- and microelectronics but also to students and to the wider audience of readers who are interested in new directions in modern electronics and optoelectronics.
650		0	_aEngineering.
650		0	_aNanotechnology.
650		0	_aSurfaces (Physics).
650	1	4	_aEngineering.
650	2	4	_aNanotechnology and Microengineering.
650	2	4	_aNanotechnology.
650	2	4	_aSemiconductors.
650	2	4	_aCharacterization and Evaluation of Materials.
700	1		_aColinge, J.-P. _eeditor.
700	1		_aBalestra, Francis. _eeditor.
700	1		_aRaskin, Jean-Pierre. _eeditor.
700	1		_aGamiz, Francisco. _eeditor.
700	1		_aLysenko, V.S. _eeditor.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
776	0	8	_iPrinted edition: _z9783642158674
830		0	_aEngineering Materials, _x1612-1317
856	4	0	_uhttp://dx.doi.org/10.1007/978-3-642-15868-1
912			_aZDB-2-CMS
999			_c107094 _d107094