000			02873nam a22004935i 4500
001			978-1-4419-9377-9
003			DE-He213
005			20140220083728.0
007			cr nn 008mamaa
008			110824s2011 xxu| s |||| 0|eng d
020			_a9781441993779 _9978-1-4419-9377-9
024	7		_a10.1007/978-1-4419-9377-9 _2doi
050		4	_aTK7800-8360
050		4	_aTK7874-7874.9
072		7	_aTJF _2bicssc
072		7	_aTEC008000 _2bisacsh
072		7	_aTEC008070 _2bisacsh
082	0	4	_a621.381 _223
100	1		_aBhushan, Manjul. _eauthor.
245	1	0	_aMicroelectronic Test Structures for CMOS Technology _h[electronic resource] / _cby Manjul Bhushan, Mark B. Ketchen.
264		1	_aNew York, NY : _bSpringer New York : _bImprint: Springer, _c2011.
300			_aXXXIV, 374p. 303 illus. _bonline resource.
336			_atext _btxt _2rdacontent
337			_acomputer _bc _2rdamedia
338			_aonline resource _bcr _2rdacarrier
347			_atext file _bPDF _2rda
505	0		_aIntroduction -- Test Structure Basics -- Resistors -- Capacitors -- MOSFETs -- Ring Oscillators -- High Speed Characterization -- Test Structures of SOI Technology -- Test Equipment and Measurements -- Data Analysis.
520			_aMicroelectronic Test Structures for CMOS Technology and Products addresses the basic concepts of the design of test structures for incorporation within test-vehicles, scribe-lines, and CMOS products. The role of test structures in the development and monitoring of CMOS technologies and products has become ever more important with the increased cost and complexity of development and manufacturing. In this timely volume, IBM scientists Manjul Bhushan and Mark Ketchen emphasize high speed characterization techniques for digital CMOS circuit applications and bridging between circuit performance and characteristics of MOSFETs and other circuit elements.  Detailed examples are presented throughout, many of which are equally applicable to other microelectronic technologies as well. The authors’ overarching goal is to provide students and technology practitioners alike a practical guide to the disciplined design and use of test structures that give unambiguous information on the parametrics and performance of digital CMOS technology.
650		0	_aEngineering.
650		0	_aElectronics.
650		0	_aSystems engineering.
650		0	_aOptical materials.
650	1	4	_aEngineering.
650	2	4	_aElectronics and Microelectronics, Instrumentation.
650	2	4	_aOptical and Electronic Materials.
650	2	4	_aCircuits and Systems.
700	1		_aKetchen, Mark B. _eauthor.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
776	0	8	_iPrinted edition: _z9781441993762
856	4	0	_uhttp://dx.doi.org/10.1007/978-1-4419-9377-9
912			_aZDB-2-ENG
999			_c106035 _d106035