000			02999nam a22004935i 4500
001			978-3-7091-0424-8
003			DE-He213
005			20140220083332.0
007			cr nn 008mamaa
008			111107s2012 au | s |||| 0|eng d
020			_a9783709104248 _9978-3-7091-0424-8
024	7		_a10.1007/978-3-7091-0424-8 _2doi
050		4	_aT174.7
050		4	_aTA418.9.N35
072		7	_aTBN _2bicssc
072		7	_aTEC027000 _2bisacsh
072		7	_aSCI050000 _2bisacsh
082	0	4	_a620.115 _223
100	1		_aStepanova, Maria. _eeditor.
245	1	0	_aNanofabrication _h[electronic resource] : _bTechniques and Principles / _cedited by Maria Stepanova, Steven Dew.
264		1	_aVienna : _bSpringer Vienna, _c2012.
300			_aVIII, 344 p. _bonline resource.
336			_atext _btxt _2rdacontent
337			_acomputer _bc _2rdamedia
338			_aonline resource _bcr _2rdacarrier
347			_atext file _bPDF _2rda
505	0		_a1 Introduction -- Directions in Nanofabrication -- 2 Nanolithography -- Fundamentals of Electron Beam Exposure and Development -- Simulation of Electron Beam Exposure and Resist Processing for Nano-Patterning -- Helium Ion Lithography -- Nanoimprint Technologies -- 3 Deposition at the Nanoscale -- Atomic Layer Deposition for Nanotechnology -- Surface Functionalization in the Nanoscale Domain -- Nanostructures Based on Self-Assembly of Block Copolymers -- Epitaxial Growth of Metals on Semiconductors Via Electrodeposition -- 4 Nanoscale Etching and Patterning -- Chemical Mechanical Polish for Nanotechnology -- Deposition, Milling, and Etching with a Focused Helium Ion Beam -- Laser Nanopatterning -- Templating and Pattern Transfer Using Anodized Nanoporous Alumina/Titania.-.
520			_aIntended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.
650		0	_aNanochemistry.
650		0	_aEngineering.
650		0	_aNanotechnology.
650	1	4	_aMaterials Science.
650	2	4	_aNanotechnology.
650	2	4	_aNanochemistry.
650	2	4	_aNanotechnology and Microengineering.
650	2	4	_aLaser Technology, Photonics.
700	1		_aDew, Steven. _eeditor.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
776	0	8	_iPrinted edition: _z9783709104231
856	4	0	_uhttp://dx.doi.org/10.1007/978-3-7091-0424-8
912			_aZDB-2-CMS
999			_c103905 _d103905