Mechanics and Physics of Precise Vacuum Mechanisms - Deulin, E. A.; Mikhailov, V. P.; Panfilov, Yu V.; Nevshupa, R. A.; SpringerLink (Online service) (Dordrecht : Springer Netherlands, 2010)
Keywords: Engineering; Vibration; Engineering design; Chemistry, inorganic; Surfaces (Physics).; Engineering; Engineering Design; Engineering, general; Tribology, Corrosion and Coatings; Surfaces and Interfaces, Thin Films; Vibration, Dynamical Systems, Control