Integrated Chemical Microsensor Systems in CMOS Technology - Hierlemann, Andreas; Baltes, H.; Fujita, Hiroyuki; Liepmann, Dorian; SpringerLink (Online service) (Berlin, Heidelberg : Springer Berlin Heidelberg, 2005)
Keywords: Chemistry; Analytical biochemistry; Weights and measures; Electronics; Optical materials; Nanotechnology; Surfaces (Physics).; Chemistry; Nanotechnology; Analytical Chemistry; Optical and Electronic Materials; Surfaces and Interfaces, Thin Films; Measurement Science, Instrumentation; Electronics and Microelectronics, Instrumentation